Industry & Applications

Semiconductors Manufacturing

Semiconductor production environments represent some of the most aggressive environments encountered by seals. Seals have to be made of ultra-pure materials, survive extreme temperatures and a mixture of fluorinated gases. For these reasons, seals for the semiconductor industry are at the cutting edge of material technology. We cover a range of specially developed high performance materials for use in critical semiconductor environments. Emphasis is placed on providing a comprehensive range of materials, including the latest generation of Perfluoroelastomers, which offer enhanced performance and improved functionality. The relentless drive to improve productivity and increase wafer yields has resulted in increased process temperatures, use of more aggressive gases and increased plasma density, all of which place escalating demands on current sealing technology. Perfluoroelastomers compounds have been created to withstand temperatures up to 330°C in aggressive media such as activated fluorine-based chemistries. The result is a new range of materials that will help extend maintenance cycles, reduce particle generation and lower the leakage rates. In addition, we can also provide FKM copolymers in black, white, brown and green, fluorosilicones in blue and translucent, plus the innovative ultra pure, nano-filled fluoropolymer.